Abstract
Cowell’s method of extracting barrier heights of top and bottom electrode metals in asymmetric metal-insulator-metal (MIM) tunneling diodes exhibiting Fowler-Nordheim tunneling is successfully automated. Pt-Al2O3-TiN MIM diodes with 5 nm insulator thickness are used in demonstration. Conditions assuring successful application of Cowell’s method and its automation are discussed.
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