Abstract
The development of novel materials for micro- and nano-electronics requires reliable characterizations of structures, sizes, and orientations of thin polycrystalline films and ensembles of nanocrystals. The electron backscatter diffraction (EBSD) technique (also known as orientation imaging microscopy or back-scatter Kikuchi diffraction method) in a scanning electron microscope (SEM) is often employed for structural characterization of this kind of materials. EBSD in SEM is, however, sensitive to the plastic deformation state of the crystals as well as to structural damage or contamination of the crystal surfaces.
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