Abstract
AbstractAtom probe tomography is a characterization technique for the analysis of the microstructure of materials at the atomic level. The basic concepts of atom probe tomography and field ion microscopy, the implementations of a field ion microscope and a three‐dimensional atom probe, including the state‐of‐the‐art local electrode atom probe, and laser and voltage pulsing methods of field evaporation are outlined in this chapter. Methods of atom probe tomography specimen preparation by electropolishing and focused ion beam methods are described. An overview of data visualization and analysis as well as data mining techniques is presented.
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