Abstract

Although micro-electro-mechanical switches are beneficial in small sizes, high levels of power handling, compatibility with CMOS process, wide bandwidth and zero power consumption, unfortunately their slow dynamics and specifically their switching time is still remains as an issue. This problem becomes even more critical in high speed switching systems like power converters, network on chip, high speed switching power amplifiers in multichannel, multi standard transceivers and etc. This paper presents a resonant switch based on a resonating structure vibrating at GHz frequencies. The switching time of the proposed resonating switch is less than 100 ps with 5 V of excitation voltage. Based on its intrinsic asymmetry, the proposed switch doesn’t require various air gaps and therefore its fabrication process is much simpler.

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