Abstract
An array of four out-of-plane, gap-closing, electret-based electrostatic energy harvesters capable to harvest over a wide frequency range is designed. The novel design consists of energy harvesters with linear springs, softening springs, hardening springs and mechanical stoppers. This unique method of designing array with combination of linear and nonlinear generators allows the system to harvest significant amount of power even with shift in vibration frequency. A dynamic model of the system is derived and optimized using MATLAB. The optimized system is built using Coventorware / MEMS+®. A maximum power of 75 nW is obtained over a frequency range of 450-760 Hz. The design also takes 75% less volume compared to an array of linear energy harvesters to generate over the same frequency range.
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