Abstract

Self-assembled oxide composite nanostructures offer novel functionalities and three-dimensional architectures, such as vertical pillars and matrix structures. One of the challenges in this field is to precisely control the positional arrangement of oxide pillars embedded in a matrix. Here, we report on an early proof-of-concept demonstration for positioning and arranging self-assembled NiO pillars in a ZnO matrix. SrTiO3 templates with artificial line groove patterns were fabricated by nanoimprint lithography (NIL). High-density NiO pillars were observed on both sides of the template line edges as well as a single array of NiO pillars in the middle of each line groove for a 90 nm line width. This simple technique provides a path towards the development of nanoscale design and applications for memory devices.Self-assembled oxide composite nanostructures offer novel functionalities and three-dimensional architectures, such as vertical pillars and matrix structures. One of the challenges in this field is to precisely control the positional arrangement of oxide pillars embedded in a matrix. Here, we report on an early proof-of-concept demonstration for positioning and arranging self-assembled NiO pillars in a ZnO matrix. SrTiO3 templates with artificial line groove patterns were fabricated by nanoimprint lithography (NIL). High-density NiO pillars were observed on both sides of the template line edges as well as a single array of NiO pillars in the middle of each line groove for a 90 nm line width. This simple technique provides a path towards the development of nanoscale design and applications for memory devices.

Highlights

  • Self-assembled nanocomposite thin films with a vertical nanopillar and matrix system have been well studied for novel potential functionalities owing to their architecture, induced vertical interfacial strain and tunable physical properties.[1,2,3,4,5,6,7,8] A wide range of material combinations has been reported for this system, such as a perovskite BaTiO3 and spinel CoFe2O41,5,9 system and a perovskite La0.7Sr0.3MnO3 and rock-salt NiO10 system

  • Self-assembled ZnO-NiO composite thin films were grown on the SrTiO3 templates by pulsed laser deposition (PLD) using an ArF excimer laser and a composite target consisting of 70 mol% ZnO and 30 mol% NiO

  • We have provided an early proof-of-concept demonstration, oxide directed self-assembly (DSA), for controlling oxide nanostructure locations in two dimensions by adopting artificially designed line groove patterns

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Summary

Introduction

Self-assembled nanocomposite thin films with a vertical nanopillar and matrix system have been well studied for novel potential functionalities owing to their architecture, induced vertical interfacial strain and tunable physical properties.[1,2,3,4,5,6,7,8] A wide range of material combinations has been reported for this system, such as a perovskite BaTiO3 and spinel CoFe2O41,5,9 system and a perovskite La0.7Sr0.3MnO3 and rock-salt NiO10 system. We confirmed the crystal structure of NiO pillars was rock-salt, and was not affected by the incorporation

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