Abstract
ZrB2/W and ZrB2/WNx multilayers with modulation periods (Λ) ranging from 3 to 12.5nm were prepared under Ar+ or N+ bombardment by ion beam assisted deposition. Extensive measurements were employed to investigate the influences of different ion bombardments and modulation periods on microstructure and mechanical properties of the multilayers. A well-defined composition modulation and layer structure with a mixed polycrystalline was proven in the multilayers. All of ZrB2/W multilayers possessed higher hardness and fracture resistance than monolithic ZrB2 or W coatings. Compared with Ar+ bombardment, N+ bombardment gave a further contribution to mechanical properties of ZrB2/WNx multilayers. The maximum hardness and critical load of ZrB2/WNx coating, when Λ was 9.6nm and N+ bombarding energy was 200eV, were up to 30.2GPa and 65.5mN, respectively. This hardest multilayer also showed the improved residual stress. These enhanced effects in ZrB2/WNx coatings were likely the result of the resistance to dislocation glide and columnar grain growth across interface as well as nanoscale strain optimization as the evolution of layer crystalline.
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