Abstract
Evidence is presented that old ESCA limitations and restrictions (e.g. big X-ray beam diameter or small “unrealistic” size of samples) are not valid any longer. The new SSX 100 ESCA spectrometer with its unique combination of ESCA innovations (focusing monochromator, parallel imaging detectors, high throughput electron optics and improved sample handling) makes solving surface problems much easier. Two applications on semiconductors and insulators using the small spot X-ray beam (diameter: 150 μm) demonstrate that small spot ESCA technique now can be applied on problems which could not be solved with conventional ESCA technique hitherto.
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