Abstract
ABSTRACTThis paper reviews the applications of polysilicon in microsensor technology and in the emerging field of microfabricated actuators. Polysilicon is an attractive material for thin-film strain gauges, and is also used to fabricate micromechanical structures. The need for better understanding of the non-electrical properties of polysilicon, such as Young's modulus, residual strain, ultimate strength, friction, and wear, is emphasized.
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