Abstract
Conventional cleaning technologies have been effective in removal of particles, metals, and organic films. However, two trends motivating the development of new techniques are 1) the desire to minimize the environmental impact of large volumes of cleaning solutions; and 2) the need to clean at the sub-45 nm level, consistent with decreasing feature sizes. We report here on the initial characterization of a system to apply electrospray techniques to variants of the SC-1 and SC-2 solutions, as well as to solvent mixtures. We describe the generation of submicron sized droplets (<1 m radius) of cleaning mixtures and demonstrate a preliminary methodology, using a combination of experimental data and phenomenological modeling approaches, to characterize the physics of the droplet-surface interaction
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
