Abstract

The possibilities of the PIXE method in combination with the RBS method in the analysis of the high- c superconducting thin films are discussed. The results obtained applying 4He ions with energies up to 3.1 MeV in the bombardment of YBaCuO layers on selected substrata are presented. The heavy element concentrations are determined by the PIXE method using the yields of K α for Cu as well as Y and L α for Ba. The quantitative analysis based on fundamental parameters as well as external standards have been applied. The content of heavy elements can be determined with an accuracy of about 2–3 rel.%. The oxygen content was determined using 3.045 MeV resonance in 16O( 4He, 4He) 16O elastic scattering with an accuracy of even 1 rel.%. The RBS method was used to determine the layer thickness as well as the chemical composition. Finally, the comparison with ICP-AES, XRF and AAS methods is given.

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