Abstract
Anomalous intense ultraviolet emission bands in the region 320–370 nm with a maximum at 340 nm were observed in radio frequency glow discharges of CF4-H2 mixtures containing 0.3%–1% of GeH4. The system of emission bands is prominent also in the discharges of GeH4-C2F6-H2 mixtures but the corresponding emission system was not observed in the discharge spectra of GeH4-CH4-H2 and SiH4-CF4-H2 mixtures. From the vibrational analysis of the bands, it was found that the emission bands almost agree with the weak emission system of GeF2, which has been tentatively assigned in earlier work as the 3B1–1A1 transition.
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