Abstract

Helium-containing Ti films are prepared using magnetron sputtering inthe helium–argon atmosphere. Isochronal annealing at differenttemperatures for an hour is employed to reveal the behaviour of heliumbubble growth. Ion beam analysis is used to measure the retained heliumcontent. Helium can release largely when annealing above 970 K. Athermal helium desorption spectroscopy system is constructed forassessment of the evolution of helium bubbles in the annealed samplesby linear heating (0.4 K/s) from room temperature to 1500 K. Also,Doppler broadening measurements of positron annihilation radiationspectrum are performed by using changeable energy positron beam.Bubble coarsening evolves gradually below 680 K, migration andcoalescence of small bubbles dominates in the range of 680–970 K, and the Ostwald ripening mechanism enlarges the bubbles with a massive releaseabove 970 K.

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