Abstract
In this work, various regimes of local anodic oxidation (LAO) of MoSe2 were studied. Here we show that there is a certain set of oxidation parameters that results in the anisotropic oxidation of MoSe2. In this mode, LAO leads to the formation of oxidized triangles. The triangles have the same orientation on the surface of the flakes, which indicates that MoSe2 is oxidized mainly along the crystallographic directions of the zigzag edges. These results can be useful for determining crystallographic directions of zigzag/armchair edges and the degree of single-crystallinity of MoSe2 flakes.
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