Abstract
The spring-mass-capacitor structure in micro-electro-mechanical systems (MEMS) is a typical macromodel, its response and stability under step voltage is presented in this paper. Energy method is used to analyze the dynamic behavior of mass block where its velocity is zero and accelerometer is zero, respectively. The condition of stability under step voltage is the initial stiffness ratio must less than 0.25, and finally the relation of energy loss and oscillating behavior of block is analyzed. The conclusion is useful to analyze the response of structure and helpful to design a MEMS system composing of spring-mass-capacitor structure.
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