Abstract

The paper demonstrates the capabilities of the analytical method for modelling the steady-state temperature distribution in 2D structure like thermal microsensors, which have been presented in part 1. The temperature distribution is determined in the following thermal microsensors: thermoelectric radiation microsensors made on cantilever, bridge and membrane thermally isolated structures; thermal converters made on three-and four-arm bridge thermally isolated structures; pellistor-type catalytic gas microsensors made on suspended plates. In the case of the thermoelectric radiation microsensors, the heat generation in absorbing layer is assumed to be inhomogeneous. In other cases, the heat generation is assumed to be homogeneous. For each type of the thermal microsensors overheating temperature maps of regions plotted by isotherms are obtained.

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