Abstract

Minority carriers injected from an active emitter into the substrate and partially collected by the bottom well junction in an epitaxial CMOS structure are studied. Two-dimensional numerical simulation has revealed that the minority-carrier collection current along the bottom well junction is contributed primarily by two mechanisms: the first due to minority carriers injected into a layer between the upper collecting plate and the bottom reflecting plate; and the second due to those penetrating the high/low junction and then spreading out in the large, highly-doped bulk as in the nonepitaxial case. Based on this observation, a new analytic model for the minority-carrier escape current has been developed as a measure of well-type guard ring efficiency. This model, including a closed-form expression as function of epitaxial layer thickness, well junction depth and guard ring width, has been confirmed by experimental data as well as by two-dimensional numerical simulation. As predicted by the model, the measured escape current has been found to be dominated by the second mechanism for the case of well junction depth close to epitaxial layer thickness while the first mechanism has been identified to dominate the escape current measured from the structure having sufficient epitaxial layer thicknesses.

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