Abstract
Robustness, versatility, high level of performance and low cost are some of the characteristics that make capacitive sensors well suited for industrial applications. They consist only in electrodes and measurement circuits but give access to position information and/or material properties. The design of capacitive sensors is however not so obvious so that simple structures are generally used to avoid time-consuming calculations and developments. We propose an analytical method to determine the sensitivity distribution of any capacitive sensor structure. This method makes it possible to rapidly optimize structures in order to increase the sensor sensitivity to one parameter or to render it less sensitive to another. Comparisons between the sensitivity map of known sensors and those obtained with the analytical method proposed in this paper show a great accordance.
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