Abstract
Micro wire electrochemical machining (ECM) using a Ø 10 µm tungsten wire as the tool electrode is presented. Since electrochemical machining does not wear out the tool, it can be easily applied to the fabrication of micro grooves by moving the tool electrode along a programmed toolpath. To minimize the side gap, ultrashort voltage pulses were applied between the tool electrode and the workpiece. Changes in the side gap according to the applied pulse voltage, pulse on-time and pulse period were investigated, and the optimal pulse condition for stable machining was obtained. By using this method, micro features such as micro grooves and gears were fabricated into stainless steel plates.
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