Abstract
Surface morphological changes and metal nanograin formation of polyethylene terephthalate films with tungsten ion implantation were studied. Tungsten ions were accelerated with a voltage of 40 kV and implanted at fluences from 5 × 10 16 to 2 × 10 17 cm −2 using a metal vapor vacuum arc implanter. Scanning electron micrographs at the highest fluence show semi-spherical hills, indicating formation of tungsten nanograins on the polymer. The tungsten nanograin formation in the polymer film is confirmed by cross-sectional observation using transmission electron microscopy. Depth profiles of tungsten atoms obtained from energy dispersive X-ray spectra indicate densification and sputtering of the polymer surface layer during implantation. These results indicate that surface morphological change is related with the effects of a critical fluence and tungsten nanograin formation.
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