Abstract
Lateral inhomogeneity has been studied in thin films of YBa 2Cu 3O 7 − δ deposited from aerosol on MgO substrates. RBS and PIXE analyses distinguished areas that were found to differ in the critical temperature T c values. The PIXE results confirmed the differences in composition between those areas. Variations in layer thicknesses were found by means of RBS analysis. Measurements made with a microbeam showed that the film within each of those areas was homogeneous. However, significant variations in the YBaCuO stoichiometry and local changes in the film thickness were found in the intermediate zone between areas with T c = 85 K and T c = 80 K.
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