Abstract
The basic characteristics of a primary-on-slider type piezoelectric actuator were theoretically analyzed, and the relationship between the thrust force and the weight force was clarified, and was verified by the experiments. As a result, when the weight force was imposed on the slider, the thrust force increased, but when too heavy a weight force was applied, the thrust force decreased. Various prototypes of two-degree-of-motion freedom plane ultrasonic piezoelectric actuators were experimentally constructed, and the fundamental characteristics were measured. The vibration mode of actuators was also analyzed by ANSYS, and compared with the experimental results. The characteristics of the plane ultrasonic piezoelectric actuators were obtained similar to the theoretical characteristics. Since the shape of this plane ultrasonic piezoelectric actuator is very simple, it is suitable for applications that complicated motions are required in limited space.
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