Abstract
The paper presents the results of studies of C–V characteristics of GaAs/In0.53Ga0.47As HEMT before and after neutron irradiation with a fluence of (6.3 ± 1.3) × 1014 cm–2. Based on the experimentally obtained characteristics, the effective electron distribution profiles of the structure were calculated before and after radiation impact. The effect of radiation defects on the δ-layers of the structure was analyzed.
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