Abstract
We have used angled magnetron sputter deposition with and without sample rotation to control the magnetic anisotropy in 20 nm NiFe films. Ferromagnetic resonance spectroscopy, with data analysis using a Bayesian approach, is used to extract material parameters relating to the magnetic anisotropy. When the sample is rotated during growth, only shape anisotropy is present, but when the sample is held fixed, a strong uniaxial anisotropy emerges with in-plane easy axis along the azimuthal direction of the incident atom flux. When the film is deposited in two steps, with an in-plane rotation of 90 degrees between steps, the two orthogonal induced in-plane easy-axes effectively cancel. The analysis approach enables precise and accurate determination of material parameters from ferromagnetic resonance measurements; this demonstrates the ability to precisely control both the direction and strength of uniaxial magnetic anisotropy, which is important in magnetic thin-film device applications.
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