Abstract

The choice of electrode’s material, it’s topography like shape, size, and position play a very important role in determination of sensitivity of an electrostrictive capacitive sensor. The electrode material is required to be in mechanical and electrical compliance with the dielectric material for getting optimum performance of the sensor.A mathematical analysis for the estimation of contribution from edge effect has also been carried out for different sizes of electrodes and separation between the electrodes. It has been observed that in capacitive sensors, with gap between electrodes in nanoscale and area of electrodes in millimetres, deviation of capacitance is of the order of 10-3 considering edge leakage as compared to capacitance, measured without considering edge leakage. But in nano range sensors, where both area and gap between electrodes are in nano scale, this deviation is more than 5%, which should not be neglected.

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