Abstract
Abstract The photoluminescence of three kinds of compensated 6H–SiC single crystals, the vanadium heavily compensated, vanadium slightly compensated, and non-vanadium compensated, has been investigated. Nitrogen (N), aluminum (Al), vanadium (V), and titanium (Ti) are the main impurities. For the vanadium heavily compensated and non-vanadium compensated semi-insulating 6H–SiC, photoluminescence of the donor–acceptor pairs (DAPs) are inconspicuous because of the rare shallow centers. For vanadium slightly compensated 6H–SiC, DAPs and Ti-related emissions are obvious. As an effective luminescence center, the Ti-related recombinations cover a broad range from 1.70 eV to 2.86 eV.
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