Abstract

The objective of this study was to improve the low repeatability in quartz crystal microbalance (QCM) measurements. The constitutive equations for the thickness-shear vibrations of an AT-cut quartz crystal with surface electrodes were used to obtain the particle vibration displacement amplitude equation. Then the mass sensitivity of piezoelectric immunosensor was analyzed and the approach to improve low repeatability was proposed. A 10MHz modified-electrode AT-cut QCM with a maximum mass sensitivity of was designed to verify uniform mass sensitivity distribution in the fully electrode region. Analysis results show that in order to improve the accuracy in QCM immunosensor measurements, it is feasible to improve its mass sensitivity.

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