Abstract
AbstractWe report on a direct‐write lithographic technique for the fabrication of micro‐lens arrays with an ultraviolet (UV) micro‐light‐emitting diode (LED) array, serving as an exposure source. Owing to the Lambertian emission distribution of LEDs, the exposed UV sensitive coating (UV epoxy) adopts the same profile, resulting in spherical lenses being formed naturally, without further reflow. This technique is distinctive from conventional UV curing method and possesses many advantages, including simplicity of processing, allows control of the dimensions of micro‐lenses through process parameters, and is readily scalable. Micro‐lens arrays of high optical quality have been fabricated by this method. The properties of the lenses are evaluated by optical microscopy and atomic force microscope. The determined focal length is close to the predicted value. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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