An interchange format for process and device simulation

Abstract

A standard format for transmitting profiles of semiconductor structures between sites and between tools is described. The standard, called the profile interchange format (PIF), is a flexible and hierarchical format, capable of storing descriptions of semiconductor structures such as those produced and used by process and device simulators. It can store detailed descriptions of the geometry, attribute profiles, material properties, and transient behavior of a single structure or a collection of structures. Two equivalent forms of the PIF are proposed to resolve conflicting demands placed on the format by its two primary uses, which are transmitting profiles between sites and local use as a database for process and device simulation. The 'intersite' form of the PIF, which can be viewed as an extension of the electronic design interchange between sites, most importantly, portability. The 'intertool' form of the PIF is, in concept, equivalent in descriptive capabilities to the intersite form, but is intended to accommodate the needs of profile interchange between tools, most importantly, efficient storage and access of data. The PIF in both modes can be extended and modified to accommodate local needs.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>