Abstract
This paper presents a new framework for integrating a planar three-dimensional (3D) magnetometer, featuring high accuracy and reduced size. Sensing elements in this design are magnetoresistance (GMR) sensors, which generally exhibit good in-plane sensitivity but limiting performance when working out-of-plane. Therefore, to improve the out-of-plane sensing ability of the GMR sensors, we design a flux guide (FG) to redirect the out-of-plane magnetic field component to the sensitive plane of the sensors. In doing so, a Ni-Zn cubic FG, combined with a full-bridge of GMR, is exploited for z-sensing axis detection. The cross-detection minimization of in-plane magnetic fields is optimized by an FG rotated by 45o in the x-y axes. Moreover, for boosting the planar sensitivity, two half-bridge GMRs are incorporated into a cross-shaped flux concentrator, working as a fullbridge sensor. The performance of the proposed design is simulated, as well as estimated the sensing features.
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