Abstract
Summary form only given, as follows. An equivalent circuit model of HANBIT RF (radio frequency) heating system is developed. The present circuit model includes transmission line, impedance matching network and reactor impedance. The reactor impedance is a sum of plasma impedance and antenna impedance including the stray impedance. The plasma impedance and antenna impedance are calculated utilizing a solution of the Maxwell-Boltzmann equation obtained under the RF-heating condition. The stray impedance includes the ohmic power loss on the reactor chamber. Based on the developed circuit model, dependence of power absorption on the various plasma parameters is investigated in the perfect matching case. In the imperfect matching case, reflection coefficient and reflectance of RF-electromagnetic wave are calculated as functions of various geometric and plasma parameters.
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