Abstract
In this paper, we proposed a fully packaged sandwich electrostatic energy harvester, which consists of two opposite charged electret layers to improve the output performance of the packaged device. The new device is based on the out-of-the-plane gap closing scheme, and the main components are similar to our previous research. This sandwich device mainly contains two variable capacitors, and the volume of the device is about 1.3 × 1.8 × 0.15 cm3. Because of the complementation between the two opposite charged variable capacitors, the output performance of the overall sandwich device is better than the single electret layer devices. We have achieved a maximum power output of 20.78 μW at the acceleration of 19.96 m/s2, which is almost 1.4 times of the packaged single capacitance structure, without changing the overall volume of the packaged device. Also, this sandwich device shows good performance at random vibration.
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