Abstract
A method for developing an electro-optic polymer Mach‒Zehnder modulator based on polymethylmethacrylate- disperse red copolymer has been investigated. The inverse scheme is chosen as the basis for preparing a microstrip structure. This scheme entails the formation of microgrooves in the lower cladding layer by combining photolithography and reactive-ion etching (RIE), with subsequent deposition of an active electro-optic layer by centrifugation. The processes of forming layers and electrodes, the interaction between layers, the light transmission through the microstrip structure, and the modulator characteristics are considered.
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