Abstract
An adaptive multigrid method for efficient multiparticle diffusion simulation is presented. This ensures avoidance of the problem of ‘stiffness’ due to large discrepancies of the particles' characteristic lengths by using a local grid decomposition algorithmic strategy in which each particle of the diffusion system has its own adaptive multilevel grid structure. This numerical approach is implemented in the two-dimensional process simulator MUSIC, whose capabilities are illustrated by the results of coupled point defect and impurity diffusion simulation under local wet oxidation conditions, as well as by the results of complete process flow simulation of the low-voltage power VDMOSFET.
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