Abstract
A closed-form analytical expression is derived to predict the threshold voltage of an ion-implanted narrow-width MOSFET. The method makes use of the Fourier transform to analyse the voltage distribution in the width cross section of the basic MOS device structure. No fitting parameter is necessary, but the dependence of threshold voltage on channel width and substrate bias thus obtained is in reasonable agreement with numerical results. The effects of peak doping, straggle and range of the implantation on the threshold voltage are also taken into account.
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