All-diamond cantilever probes for scanning probe microscopy applications realized by a proximity lithography process

Abstract

All-diamond probes with an integrated tip were fabricated by means of a proximity lithography process and hot-filament chemical vapor deposition of polycrystalline diamond. Fabrication relies on the separate definition of the vertical and lateral cantilever probe geometries in two successive process steps. This process scheme offers the capability to adapt the mechanical properties of cantilever probes, e.g., the momentum of inertia of the cantilever beam, i.e., its compliance and resonance frequency, and the inclination angle of the tip with respect to the sample surface. Atomic force microscopy investigations of a SrTiO3 calibration sample demonstrate the application potential of these probes.