Abstract
Al 2O 3–cyanate ester hybrid thick films had high Al 2O 3 contents over 75 vol.% were fabricated as 3D integrated substrates. The Al 2O 3–cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al 2O 3 thick films deposited by aerosol deposition (AD). Al 2O 3 particles were packed as high-density layers in the porous Al 2O 3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al 2O 3–cyanate ester hybrid thick films had dielectric constant of 7.6 and quality ( Q) factor of 390, and both were nearly independent of the measuring frequency.
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