Abstract
Polymers based on norbornene have been used for low-k dielectric materials, advanced photoresists, and as sacrificial materials in the formation buried air-gaps. In this study, the hardness of thin films of butylpolynorbornene - triethoxysilylpolynorbornene copolymer was enhanced by exposure to electron beam radiation. The effect of electron energy, dose, and temperature on the thermal and mechanical properties of the irradiated copolymer films was investigated using dynamic thermal gravimetric analysis and nanoindentation. The hardness of the copolymer thin films was increased by electron beam irradiation; however, the thermal stability was degraded.
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