Air damping models for micro- and nano-mechanical beam resonators in molecular-flow regime

Abstract

Researches on energy dissipation of micro- and nano-mechanical beam resonators into the surrounding air are classified into two models, air drag force damping of the resonant beam vibrating in free space and squeeze film air damping of the resonant beam vibrating nearby walls. Appropriate application of these two models are crucial to the design of high-Q micro- and nano-mechanical beam resonators. In this paper, we will present a detail analysis on appropriate application range of these two models for evaluating air damping in micro- and nano-mechanical beam resonators. The two models are applied for investigating damping in the cantilevered and bridged beam resonators. The obtained analysis results show the significance difference between the two models for estimating the quality factor of the micro- and nano-mechanical beam resonators. The criterion for the distinction between the two models is derived by using the ratio factor of damping coefficients of micro- and nano-mechanical beam resonators.