Abstract

Surface acoustic wave (SAW) devices have gained popularity for use in various industrial applications due to their compactness, ease of fabrication, low cost, high sensitivity, stability, passiveness, and wireless transmission capabilities. This paper provides a comprehensive review of recent advances in the development of next-generation industrial-based SAW sensors, including those for temperature, biomedical, chemical, pressure, and gas concentration measurements. The scope of this review also encompasses the technical advancements made in the area of harsh environment SAW sensors over the last two decades. The review concludes by discussing the potentials, open challenges, and future research directions in this type of sensors. Overall, this paper provides a valuable resource for researchers and engineers working in the field of SAW-based sensors, highlighting the advancements and challenges in this rapidly evolving area.

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