Abstract

We present a method for aberration correction in a confocal microscope that successfully combines both a spatial light modulator and a deformable membrane mirror. An active locking technique is used that benefits from the fast update rate of the deformable membrane mirror and the large effective stroke of the spatial light modulator. Concentrating on defocus, we were able to track 'best focus' over a distance of 80 μm with a lock RMS precision of 57 nm. In principle, this technique can be applied to any Zernike mode or aberration that can be accurately reproduced on the deformable membrane mirror.

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