Abstract
High reflectivity multilayer soft X-ray mirrors were deposited using a dc triode sputtering system, equipped with facilities for accurately monitoring film thickness. Absolute reflectivity measurements of Ni-C and W-C multilayers at λ = 44.79 Å (CK α) in the first and second order Bragg peaks, and at λ = 67.8 Å (BK α) in the first order only, were carried out using a special soft X-ray spectrogoniometer which enables the manufacturing conditions to be rapidly optimized without relying on synchrotron radiation. In this spectrometer the incident beam is polarized by two parallel plane multilayer mirrors fixed at an angle close to the Brewster angle (θ ≈ 45°). Thus the measured reflectivities are not affected by the large variation of the P component versus the angle. The preliminary results obtained at λ = 113 Å (BeK α) are also presented.
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