Abstract
Abstract Spherical concave surfaces with high numerical apertures are required in industry for lithography optics at ultraviolet and X-ray wavelengths. Among the systematic errors in these spherical-surface test, the gravitational deformation has not been separated from the other optical aberrations. We utilized a two-surface comparison method to quantify the gravitational deformation in a vertical Fizeau interferometer. Certain aberrations vary with rotation around the optical axis. We averaged the ordinary aberrations and isolated the aberration caused by gravitational deformation. Experimental results show that a 4-in concave surface with an F -number 0.75 reveals to have a gravitational deformation of 7 nm peak-to-valley.
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