Abstract
The differential cross-section of the 16O(α,α) 16O elastic scattering resonance at 7.30–7.65 MeV has been calibrated with an overall accuracy of 4% at 170° scattering angle (laboratory frame of reference) using anodized Ta 2O 5 films of pre-calibrated thickness as standards. This extremely strong (about 170 times the Rutherford cross-section) and broad (about 300 keV wide) resonance varies slowly with energy in the range 7.34–7.64 MeV, has a maximum value of 837 mb/sr at 7.61 MeV, and falls off abruptly above 7.64 MeV and below 7.34 MeV. The angular dependence of the resonance was measured in the range 140–172° at incident energy 7.62 MeV and was found to increase monotonically toward 180°. This strong resonance allowed us to measure the oxygen content in the very heavy element target ThO 2 pellets and in oxidized InP substrates with detection sensitivity in the atomic monolayer range. The large width of this resonance allowed oxygen depth profiling to several microns with depth resolution a few tens of nm. Measurements combined with RUMP computer simulations using TRIM stopping cross-sections and our measured values of the elastic resonance scattering cross-section have been used to depth profile SiO 2 surface and buried layers in SIMOX structures.
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