Abstract
Femtosecond laser ablation of aluminum oxide (Al 2O 3) and aluminum nitride (AlN) ceramics was performed under normal atmospheric conditions ( λ = 785 nm, τ p = 185 fs, repetition rate = 1 kHz), and threshold laser fluencies for single- and multi-pulse ablation were determined. The ablation characteristics of the two ceramics showed similar trends except for surface morphologies, which revealed virtually no melting in Al 2O 3 but clear evidence of melting for AlN. Based on subsequent X-ray photoelectron spectroscopy (XPS) analyses, the chemistry of these ceramics appeared to remain the same before and after femtosecond laser ablation.
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