Abstract
A 1.2-MV cold field-emission holography electron microscope equipped with a spherical-aberration corrector has been developed. The microscope has the following superior properties: stabilized accelerating voltage (stability: 0.3 ppm peak to peak), minimized electrical and mechanical fluctuation, and a field emission gun with high stability and brightness [1]. Information transfer of 43 pm was accomplished by using W{633} chromatic lattice fringes. When this developed FE-TEM was applied to observations of GaN [411] thin samples, the projected Ga atom positions were visualized with 44 pm separation—the smallest separation ever observed. This resolution is an important base performance for effective electron holography observations. The microscope enables performing electromagnetic field observations at high-resolution that were not possible with 300-kV TEMs in various types of research. This research was supported by a grant from the Japan Society for the Promotion of Science (JSPS) through the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program),” initiated by the Council for Science and Technology Policy (CSTP). [1] K. Kasuya et al, J. Vac. Sci. Technol. B 32, 031802 (2014). Figure: 1.2-MV Holography Electron Microscope
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