Abstract
A modularly equipped scanning probe microscope (SPM)-based hybrid system isdeveloped, expanding application fields and performances of former instruments.The SPM head can easily be incorporated into the analysis chamber of mostscanning electron microscopes (SEMs) and both systems can be handled by theelectronics within one software simultaneously. Contact and non-contact scanningforce microscope (SFM) measurements obtained inside an environmental SEM forthe first time demonstrate resolutions of less than 0.2 nm under workingconditions. Both probes can be used simultaneously either as actuators or sensorsto deliberately modify and analyse sample properties as well as to characterize theprobe interactions. This is the essential advantage of hybrid systems,besides the great number of well known complementary analyses whichcan be performed with each microscope at the same sample area. Theuse of an electron beam and a SFM tip as two independent electricalactuators and sensors is demonstrated to be exemplary. Interaction of theprobes with each other is a new aspect, which is presented and discussed.
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