Abstract
A new universal inelastic mean free pathlength (IMFP)-predictive equation (the G1 equation) has been formulated for use in the analytical electron spectroscopies XPS and AES which essentially states that the IMFP of an electron traversing matter is inversely proportional to the atomic density. The equation is based on a concept of matter in which the latter consists of clusters of interaction-prone regions (identified with the orbitals of an atom) in an otherwise interaction-free space. The energy dependence and best values for two fitting parameters were obtained from a large set of IMFPs, derived by Tanuma, Powell and Penn (TPP) from published optical data. The G1 equation has been developed to allow the IMFPs to be predicted not only for regular phases of elements and compounds (a common restriction on existing IMFP-predictive equations), but also for any sub- and non-stoichiometric arrangement of atoms found at technological surfaces. Evidence is presented which substantiates the claim of universal applicability of the G1 equation.
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