Abstract
A three-dimensional lattice gas approximation for multilayer adsorbates is substantiated on the basis of statistical physics. In addition, some problems of equilibrium thermodynamics and kinetics are formulated, and a number of approximations are derived. A detailed kinetic theory of thin film growth, which is complementary to the applied approaches based on phenomenological models, thermodynamics of nonequilibrium processes, and solid medium and lattice gas models, is developed.
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