Abstract
We present a sub-mm3, fully wireless, implantable intraocular pressure monitor microsystem (IMM) that comprises a powering coil, an antenna, a piezoresistive micro-electro-mechanical system pressure sensor, and a pressure sensing IC. The system provides a 24-h intraocular pressure monitoring, which is not possible with currently used tonometric measurements. The IMM volume is limited to 0.38mm3(4 × smaller than previous state-of-the-art) for the studies on laboratory rodents prior to human use. A cavity resonator magnetic coupling delivers the wireless power to the chip with4.89%efficiency. The chip senses a change in a differential sensor resistance by providing a low-power differential resistance to frequency conversion with the measured standard deviation in differential resistance sensing of . The data packets are wirelessly transmitted by an ultralow power 2.4-GHz ISM band OOK transmitter. The IMM is integrated on a 5-μm-thick biocompatible Parylene C substrate. Implemented in a 0.18-μm CMOS process, the system achieves 0.67-mmHg pressure sensitivity with differential resistance sensing and dissipates only 6.3nW with 30min of measurement intervals. We verify the IMM functionality in the invivo biological experiment.
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